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Home > Pure-play Wafer Foundry > Technology > GaAs & GaN RF Technologies> GaN/SiC HEMT |
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BAW Filter Process
- AlN and ScAlN BAW Resonator Technology
- Ideal for High Performance RF Filters in Mobile Communication Systems
- Low Cost and High Volume Manufacturing
- Wafer Level Packaging (WLP) Available
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Typical Applications
- Commercial: 4G LTE, Sub-6 GHz 5G, WiFi-6E, WiFi-7 Filters
- Defense/Aerospace: X-band Filter
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Process Features
- Unique patent-protected BAW process
- AlN resonators for narrowband filters:
- Keff2 of 6%
- Q-factor up to 3000
- Frequency up to 8 GHz
- ScAlN resonators for wideband filters:
- Keff2 of 20%
- Q-factor up to 1800
- Frequency up to 7.5 GHz
- Frequency trimming accuracy: +/- 0.1%
- High power-handling capabilities:
- 45 dBm at 2.5 GHz
- 35 dBm at 5 GHz
- Wafer level packaging
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Resonator Performance |
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2.4 GHz ScAlN Demonstration Filter |
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5.7 GHz ScAlN Demonstration Filter |
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